ETEL to Showcase New Vibration Isolation System

ETEL is very proud to announce the release of its new QuiET – Active Isolation System at SEMICON West in San Francisco, CA from July 8-10 (Booth # 1217). From now on, an advanced motion platform from ETEL does not only include the motion system and its associated motion controllers, but can also benefit from its proprietary active isolation system. This makes ETEL the only motion system supplier designing and offering a complete solution!

QuiET is a 6 Degrees Of Freedom (DOF) module cancelling both stage-born and ground-born vibrations resulting in:

Higher throughput thanks to shorter move and settle times
Higher process stability thanks to lower jitter and better position stability at motion stage level
Lower cost of ownership thanks to a single supplier for the complete advanced motion platform

Vibrations in the machine?
High-end applications in the semiconductor industry always require tighter performances in terms of position stability, vertical jitter, move and settle times and tracking error, to name but a few. Complex machine equipment is, in one way or another, connected to the granite of the motion platform. As such, any vibration at the granite level translates into inaccuracies and longer settle times at the process tool level. Thanks to ETELs solution, getting rid of those vibrations has never been so efficient.

Pushing Motion Performance to the next level!
Enhancing the synergies between its proprietary state-of-the-art components including motors, encoders, bearings, controllers, cable solutions and precision mechanics, ETEL was able to design a high performance active damping solution. Through a homogeneous, fully-digital and deterministic motion control architecture, acceleration feed forward accuracy has been brought to outstanding levels: higher than 99%! This makes move and settle times and residual vibration levels shrink to unprecedented values, which directly brings stability to the customers process.

Modular, scalable, and compatible with any footprint!
The QuiET Series has been designed to be highly modular and scalable. Thanks to a list of preselected active and passive components, ETEL can very quickly find the optimized solution to accommodate the customers needs. Spring elements, Lorentz actuators and proprietary sensors are embedded within a sandwich-based architecture that is then customized to fulfill specific footprint requirements.

ETEL taking full responsibility of overall performance
The QuiET series is pushing ETELs Forward Integration Strategy one step further. When using the QuiET module as part of an advanced motion platform, ETEL becomes the sole point-of-contact for everything relating to performance: eliminating the need to coordinate between different suppliers, ensuring optimization of communication channels, and allowing easier servicing and commissioning.