PI (Physik Instrumente) has introduced its newest X-Y piezomotor positioners to the existing PIHera family of over 60 compact, direct metrology stages available in a large variety of travel ranges up to 1800 µm with resolution of less than 1nm.
PIHera precision closed-loop XY-stages are equipped with absolute-measuring direct-metrology capacitance sensors and provide resolution down to 0.1nm, in a compact, FEA optimized package for high stiffness and long lifetime. Direct metrology provides higher stability and linearity compared to inferred metrology feedback – usually based on piezo resistive strain gauges, a technique also available from PI for entry level piezo nanopositioners. Cost effective, positioning accuracy of 0.02%, and optional vacuum compatibility make these compact stages ideal for applications that require frictionless, vibration-free, positioning with high linearity.
Flexure-guided piezo positioning stages are advantageous when compared to classical mechanical bearing-driven motorized systems due to vibration-less motion, virtually unlimited resolution, and fast response. With the exclusion of rolling elements, there is no bearing rumble to affect the uniformity or straightness of motion.
Driven by PI’s proprietary PICMA® piezo ceramics (tested by NASA/JPL for 100 billion cycles and employed on the Mars Rover), PIHera piezo stages have unique properties especially important in long-term research and industrial applications, including a temperature tolerance range of -20 to 80 ˚C
Common applications include micro-assembly, beam guidance, photonics, and optical metrology all of which require nanometer adjustment precision, most times in compact spaces.
For more information, visit www.pi-usa.us.
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