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You are here: Home / Integrated Motion Systems / Gantries + Stages / High-Performance Parallelogram Voice Coil Positioning Stage

High-Performance Parallelogram Voice Coil Positioning Stage

June 17, 2009 By Miles Budimir Leave a Comment

Voice Coil Act-PR-4x5

Sunnyvale, CA – The PVS-5.5 Parallelogram Voice Coil Stage from Equipment Solutions is a complete, compact high performance positioning system. This compact stage (37mm x 31 mm x 32 mm) weighing just 70gm features a 5mm clear aperture through the center of the motor and the friction-free, flexure linking system. Non-linearity is <±0.5% throughout the stages 5mm range of motion. The PVS-5.5 Parallelogram Voice Coil Stage is ideal for optical focusing and micropositioning applications such as semiconductor, medical, optical testing, scanning microscopy, circuit board assembly, and micro manufacturing.

The PVS-5.5 Parallelogram Voice Coil Stage features a high force, frictionless voice coil motor and infinite life flexure system that provides superior responsiveness and accuracy (positioning resolution 75nm) over conventional leadscrew or belt drives and produces the least amount of electrical noise of any motor currently available. The stage can be mounted in a horizontal or vertical position and for easy integration, tapped and clearance holes are provided in the base.

An integral sub-micron linear displacement sensor with high bandwidth and low noise for high responsiveness and precise movements featuring frictionless optical technology completes this positioning system. This cleanroom compatible positioning system is low cost and uses ±12V to ±24V @ 1A. The PVS-5.5 Parallelogram Voice Coil Stage is available with the Equipment Solutions, Inc. SCA814 Servo Controlled Amplifier, and to aid integration into a new or existing application CAD drawings are available on the Equipment Solutions, Inc. website.

For additional information contact Equipment Solutions at: 408-245-7161 or Fax: 408-245-7160, or via e-Mail at info@equipsolutions.com.

www.equipsolutions.com

Filed Under: Gantries + Stages Tagged With: stage

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