Sunnyvale, Calif. – Equipment Solutions’ VCS-2020 Voice Coil Stage features a 20 mm diameter aperture, 20 mm (0.7874 in.) travel, and sub-micron (1.1811 10-6 in.) positioning resolution. An integrated Analog position feedback sensor assures 100 nanometer (3.937 10-6 in.) repeatability. The cross-roller voice-coil stages are self contained, compact, and can be mounted in a horizontal or vertical axis.
The compact 117 x 75 x 81 mm (4.60 x 2.96 x 3.18 in.), low mass, voice coil stage is a fully self-contained system including a high precision cross roller stage, voice coil actuator, analog position sensor, servo amplifier and servo controller. The low-inertia cross roller stage is integral to the standard threaded “C” lens mount and motor coil for tip/tilt free motion. Custom lens mounts are available. The voice coil motor is rated at 17.8 N (4 lbs.) continuous force and 71.8 N (16 lbs.) peak for 10 seconds and is cleanroom compatible. For easy integration into a new or existing application, the VCS-10H Voice Coil Stage has multiple sets of mounting holes on several surfaces.
This compact voice coil stage is ideal for such micro-positioning applications as scanning interferometry, disk drive testing, auto focus systems, surface structure analysis, confocal microscopy, biotechnology, and semiconductor test equipment.