Low-profile XY stage features 1-micron resolution, 2-micron repeatability

The AU200-100×100-SC (Solid Core) stage is the newest addition to the expanding line of precision XY stages from OES (Optimal-Engineering Systems, Inc.) The linear travel of the X and Y axes is 100 mm x 100 mm (3.937 in. x 3.937 in.) and the resolution of the X and Y axes is 20 microns (non-micro-step) or 1 micron (20 micro-steps per step motor driver in use), the typical repeatability is 2 microns, and the typical positional accuracy is 3 microns. A low-profile XY stage measuring just 80 mm (3.150 in.) high with a compact footprint (including the motors) of 348 mm x 348 mm (13.701 in. x 13.701 in.), the stage is designed for alignment, assembly, laser drilling and machining, industrial, medical, testing, scanning, semiconductor handling, and optical applications.

Preloaded V-groove and crossed roller bearings and ground 4 mm per-turn lead screws having just 2 microns of backlash all contribute to the high precision and stiffness of the AU200-100×100-SC stage. The table measures 300 mm x 300 mm (11.811 in. x 11.811 in.) and has a precision pattern of 21 drilled and threaded mounting holes to easily add special tooling or fixtures, and for easy integration into new and existing applications. Additional tooling plates are also available for custom and interchangeable applications.

The standard two-phase (1.8˚) stepper motors have knobs for manual adjustments of each axis of the stage. However, the knobs can be replaced with incremental encoders for position verification. As an option, servo motors and compatible motion controllers are also available from OES, or the AU200-100×100-SC stage can be ordered as a complete plug-and-play motion control system.

For more information, visit http://www.oesincorp.com.