Miniature Piezo Flexure Positioning Stage from PI

PI’s (Physik Instrumente) new PIHera Z flexure-guided piezo nanopositioning stage features travel ranges of 50 µm to 250 µm (400 µm open-loop). 

Flexure guided piezo positioning stages provide vibrationless motion with virtually unlimited resolution and fast response. Due to the lack of rolling elements, there is no bearing rumble to affect the uniformity or straightness of motion. PIHera precision closed-loop Z-stages are equipped with absolute-measuring direct-metrology capacitance sensors and provide resolution down to 0.1nm, in a compact, FEA optimized package for high stiffness and long lifetime. Direct metrology provides higher stability and linearity compared to inferred metrology feedback – usually based on piezo resistive strain gauges, a technique also available from PI for entry level piezo nanopositioners. Cost effective, positioning accuracy of 0.02 %, and optional vacuum compatibility make these compact stages ideal for applications that require frictionless, vibration-free, positioning with high linearity.

Driven by PI’s proprietary PICMA® piezo ceramics (tested by NASA/JPL for 100 billion cycles and employed on the Mars Rover), PIHera piezo stages have unique properties especially important in long-term research and industrial applications, including temperature tolerance range of -20 to 80 C.

Typical applications include micro-manufacturing, photonics and optics alignment, semiconductor test equipment, biotechnology, surface metrology, nanometrology, and nanopositioning, among others.

For more information, visit www.pi-usa.us.