Sub-nm moves from dual-axis EtherCAT PWM servo drives

ACS Motion Control now sells a NPMPM Series EtherCAT pulse-width-modulation (PWM) servo drives. They deliver the accuracy of linear drives without their drawbacks. The PWM servo drives are significantly smaller, much more efficient, produce less heat dissipation, better protected and lower in cost. More after the jump.

An optional 10-MHz laser encoder interface and a control algorithm lets positioning systems get speeds above 2 m/sec, sub-nanometer jitter values, nanometer velocity tracking errors, extremely low settling time, and uncompromised system robustness with minimal sensitivity to disturbances and load changes.

“Recently, the drives have been tested by the Fraunhofer Institute for Production Technology (Fraunhofer-Institut für Produktionstechnologie) IPT in Germany, and achieved standstill jitter and step response results that are better than any other drives that this institute has tested so far,” said Ze’ev Kirshenboim, ACS Motion Control president.

The NPMPM is a slave that runs under any ACS EtherCAT masters. The type of drives have already been proven successfully in the most demanding applications of wafer metrology & inspection, FPD inspection, and ultra-precision machining for processing of optical components.

Two drives per unit
Voltage and current range
- 12Vdc – 100Vdc
- Up to 13.3A / 40A (cont./peak)
Digital I/O
- Inputs: 4 registration marks and 2 general purpose
- Outputs : 2 Position Event Generators and 2 general purpose
Analog I/O
- Inputs:4, 12 bit resolution, /-10V
- Outputs: 4, 16 bit resolution, +/-10V
Position feedforward for active vibration isolation systems
Optional motor phases shortening relays
No compromise speed and resolution:
- Up to 4 Analog Sin-Cos 1Vptp encoder with raw frequency up to 10MHz
- 2 Squared Sin-Cos output
- Multiplication factor up to 64536
- Automatic offset and phase compensation
- Dual feedback
Optional STO (Safe Torque Off)